JPH01120037U - - Google Patents

Info

Publication number
JPH01120037U
JPH01120037U JP16446388U JP16446388U JPH01120037U JP H01120037 U JPH01120037 U JP H01120037U JP 16446388 U JP16446388 U JP 16446388U JP 16446388 U JP16446388 U JP 16446388U JP H01120037 U JPH01120037 U JP H01120037U
Authority
JP
Japan
Prior art keywords
air
filter
ultra
approximately
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16446388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH031739Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988164463U priority Critical patent/JPH031739Y2/ja
Publication of JPH01120037U publication Critical patent/JPH01120037U/ja
Application granted granted Critical
Publication of JPH031739Y2 publication Critical patent/JPH031739Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1988164463U 1988-12-21 1988-12-21 Expired JPH031739Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988164463U JPH031739Y2 (en]) 1988-12-21 1988-12-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988164463U JPH031739Y2 (en]) 1988-12-21 1988-12-21

Publications (2)

Publication Number Publication Date
JPH01120037U true JPH01120037U (en]) 1989-08-15
JPH031739Y2 JPH031739Y2 (en]) 1991-01-18

Family

ID=31450094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988164463U Expired JPH031739Y2 (en]) 1988-12-21 1988-12-21

Country Status (1)

Country Link
JP (1) JPH031739Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000346416A (ja) * 1999-06-08 2000-12-15 Takasago Thermal Eng Co Ltd 循環型クリーンルーム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629732U (en]) * 1979-08-14 1981-03-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629732U (en]) * 1979-08-14 1981-03-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000346416A (ja) * 1999-06-08 2000-12-15 Takasago Thermal Eng Co Ltd 循環型クリーンルーム

Also Published As

Publication number Publication date
JPH031739Y2 (en]) 1991-01-18

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